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马新,何新波,梁艳媛,邱海鹏.气体流量对LPCVD ZrC涂层结构和沉积机理的影响[J].稀有金属材料与工程(英文),2020,49(2):589~594.[maxin,Hexinbo,Liangyanyuan and Qiuhaipeng.Effect of Total Flow Rate on Morphology and Growth Mechanism of ZrC Coating Prepared by LPCVD[J].Rare Metal Materials and Engineering,2020,49(2):589~594.]
Effect of Total Flow Rate on Morphology and Growth Mechanism of ZrC Coating Prepared by LPCVD
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Received:March 21, 2019  Revised:May 07, 2019
DOI:
Key words: ZrC coating  total flow rate  low pressure chemical vapor deposition  microstructure  growth mechanism.
Foundation item:国家重点基础研究发展计划(2015CB655200),国家自然科学基金项目(91216302)
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maxin,Hexinbo,Liangyanyuan and Qiuhaipeng  
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Abstract:
      Abstract: Zirconium carbide (ZrC) coatings were deposited on graphite substrate at 1200°C by low pressure chemical vapor deposition (LPCVD) from the Zr-Br2-C3H6-H2-Ar system. The effect of total flow rate on the morphology and growth mechanism of ZrC coatings were investigated. As the total pressure increased, the deposition rate increased firstly and then decreased slowly, the maximum value was 3.37 g-3?cm-2?h-1. Meanwhile, the preferential orientation of ZrC coatings changed evidently, the (200) plane was the preferential orientation of ZrC coatings at the total flow rate of 600~800 ml/min. XPS showed that the C/Zr ratio of ZrC coatings increased from 0.85 to 1.49. At the total flow rate below 200 ml/min, the ZrC coatings were dense and composed of equiaxed gain structure. As the total flow rate increased from 400 to 800 ml/min, the ZrC coatings were well-faceted pyramidal-shaped crystals. When the total flow rate above 1000 ml/min, the ZrC coatings with a loose complex island-like gains. The variations of ZrC coatings can mainly be attributed to boundary layer with increasing the total flow rate.