+Advanced Search
Fabrication of uniform ZrC coating by low pressure chemical vapor deposition: The in-situ bromination method
DOI:
Author:
Affiliation:

National key laboratory of advanced composites, AVIC Composite Technology Center,,

Clc Number:

Fund Project:

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    A bromination apparatus was designed and manufactured to accurately control the flow rate of ZrBr4 vapor. Zirconium carbide (ZrC) coatings were deposited on graphite substrate at 1200°C by low pressure chemical vapor deposition from the Zr-Br2-C3H6-H2-Ar system. The effects of gas composition (input C/Zr ratio) on the morphology and growth mechanism of ZrC coatings were investigated. The coating deposition process was controlled by the surface reaction kinetics at the input C/Zr ratio of 1.5, leading to a loose structure. When the input C/Zr ratios were 0.5 and 1, coating growth was dominated by diffusion kinetics, resulting in (200) preferential orientation with a dense columnar structure. Meanwhile, ZrC coating without free carbon was produced at the input C/Zr ratio of 0.5.

    Reference
    Related
    Cited by
Get Citation

[Xin Ma, Haifeng Hu, Haipeng Qiu. Fabrication of uniform ZrC coating by low pressure chemical vapor deposition: The in-situ bromination method[J]. Rare Metal Materials and Engineering,2018,47(S2):58~61.]
DOI:[doi]

Copy
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:December 11,2017
  • Revised:December 11,2017
  • Adopted:February 01,2018
  • Online: November 01,2018
  • Published: