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The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors
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Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center

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The National Natural Science Foundation of China (General Program, Key Program, Major Research Plan)

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    Abstract:

    Ti(C,N,O) films were deposited on Si (100), 304 stainless steel by Filtered Cathodic Vacuum Arc (FCVA) using CO2 and N2 (with ratio of 1:1) as precusors. The effect of gas flow rate on the composition, phase structure and properties of films was investigated by XPS, XRD, Raman, SEM, Tribological Test and Electrochemical workstation. The contents of C and N increase obviously, while contents of O and Ti decrease slightly as the gas flow rate increasing from 10sccm to 50sccm. The contents of C and N decrease, while content of Ti increases slightly and content of O increases dramatically as the gas flow rates from 50sccm to 80sccm. The phase structure of Ti(C,N,O) films transformed from nc-Ti(C,N,O) nanocrystal structure to nc-Ti(C,N,O)/a-CNx nanocomposite structure, a-TiO2/a-CNx and N-doped a-TiO2/a-C nanocomposite structure as gas flow rate increasing from 10sccm to 80sccm. The N-doped a-TiO2/a-C nanocomposite showed the lowest friction coefficient. Both nc-Ti(C,N,O)/ a-CNx nanocomposite structure and N-doped a-TiO2/a-C nanocomposite structure showed good anticorrosion ability in Hanks balance solution.

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[Hou Qingyan, Shen Yongqing, Fu Kaihu, Zhou Han, Ying Minju, Zhang Xu, Liao Bin. The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors[J]. Rare Metal Materials and Engineering,2017,46(12):3606~3612.]
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History
  • Received:October 17,2016
  • Revised:December 14,2016
  • Adopted:January 06,2017
  • Online: January 04,2018
  • Published: