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侯庆艳,沈永青,伏开虎,周晗,英敏菊,张旭,廖斌.利用FCVA法和CO2、N2制备Ti(C,O,N)纳米复合薄膜的研究[J].稀有金属材料与工程(英文),2017,46(12):3606~3612.[Hou Qingyan,Shen Yongqing,Fu Kaihu,Zhou Han,Ying Minju,Zhang Xu,Liao Bin.The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors[J].Rare Metal Materials and Engineering,2017,46(12):3606~3612.]
The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors
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Received:October 17, 2016  Revised:December 14, 2016
DOI:
Key words: Ti(C,N,O)  Filtered arc  CO2  corrosion  nanocomposite
Foundation item:国家自然科学基金项目(面上项目,重点项目,重大项目)
Author NameAffiliationE-mail
Qingyan Hou Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center www-hqy@163.com 
Shen Yongqing Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center  
Fu Kaihu Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center  
Zhou Han Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center  
Ying Minju Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center  
Xu Zhang Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center zhangxu@bnu.edu.cn 
Liao Bin Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center  
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Abstract:
      Ti(C,N,O) films were deposited on Si (100), 304 stainless steel by Filtered Cathodic Vacuum Arc (FCVA) using CO2 and N2 (with ratio of 1:1) as precusors. The effect of gas flow rate on the composition, phase structure and properties of films was investigated by XPS, XRD, Raman, SEM, Tribological Test and Electrochemical workstation. The contents of C and N increase obviously, while contents of O and Ti decrease slightly as the gas flow rate increasing from 10sccm to 50sccm. The contents of C and N decrease, while content of Ti increases slightly and content of O increases dramatically as the gas flow rates from 50sccm to 80sccm. The phase structure of Ti(C,N,O) films transformed from nc-Ti(C,N,O) nanocrystal structure to nc-Ti(C,N,O)/a-CNx nanocomposite structure, a-TiO2/a-CNx and N-doped a-TiO2/a-C nanocomposite structure as gas flow rate increasing from 10sccm to 80sccm. The N-doped a-TiO2/a-C nanocomposite showed the lowest friction coefficient. Both nc-Ti(C,N,O)/ a-CNx nanocomposite structure and N-doped a-TiO2/a-C nanocomposite structure showed good anticorrosion ability in Hanks balance solution.