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侯庆艳,沈永青,伏开虎,周晗,英敏菊,张旭,廖斌.利用FCVA法和CO2、N2制备Ti(C,O,N)纳米复合薄膜的研究[J].稀有金属材料与工程(英文),2017,46(12):3606~3612.[Hou Qingyan,Shen Yongqing,Fu Kaihu,Zhou Han,Ying Minju,Zhang Xu and Liao Bin.The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors[J].Rare Metal Materials and Engineering,2017,46(12):3606~3612.]
The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors
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Received:October 17, 2016  Revised:December 14, 2016
DOI:
Key words: Ti(C,N,O)  Filtered arc  CO2  corrosion  nanocomposite
Foundation item:国家自然科学基金项目(面上项目,重点项目,重大项目)
Author NameAffiliation
Hou Qingyan,Shen Yongqing,Fu Kaihu,Zhou Han,Ying Minju,Zhang Xu and Liao Bin  
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Abstract:
      Ti(C,N,O) films were deposited on Si (100), 304 stainless steel by Filtered Cathodic Vacuum Arc (FCVA) using CO2 and N2 (with ratio of 1:1) as precusors. The effect of gas flow rate on the composition, phase structure and properties of films was investigated by XPS, XRD, Raman, SEM, Tribological Test and Electrochemical workstation. The contents of C and N increase obviously, while contents of O and Ti decrease slightly as the gas flow rate increasing from 10sccm to 50sccm. The contents of C and N decrease, while content of Ti increases slightly and content of O increases dramatically as the gas flow rates from 50sccm to 80sccm. The phase structure of Ti(C,N,O) films transformed from nc-Ti(C,N,O) nanocrystal structure to nc-Ti(C,N,O)/a-CNx nanocomposite structure, a-TiO2/a-CNx and N-doped a-TiO2/a-C nanocomposite structure as gas flow rate increasing from 10sccm to 80sccm. The N-doped a-TiO2/a-C nanocomposite showed the lowest friction coefficient. Both nc-Ti(C,N,O)/ a-CNx nanocomposite structure and N-doped a-TiO2/a-C nanocomposite structure showed good anticorrosion ability in Hanks balance solution.