TiAlSiN films deposited on stainless steel,HSS and p<100> silicon substrates were prepared by ion beam assisted deposition and vacuum electric arc deposition technology.The films phase and morphology obtained by these processes were analyzed and compared by XRD and SEM.The microhardness of the films on HSS was determined and their wear resistance was studied.The results show that the films obtained by plasma auxiliary vacuum arc deposition technology have a preferred orientation on(200) crystal face,the surface morphology gets improved,and the microhardness and wear resistance of the films increase.