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钛工业进展:2020,37(5):18-22
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TC4钛合金表面WSi_2/W_5Si_3复合涂层制备及性能研究
Preparation and Properties of WSi_2/W_5Si_3 Composite Coating on TC4 Titanium Alloy
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中文摘要: 利用磁控溅射(PVD)、化学气相沉积(CVD)以及热扩散渗硅方法在TC4钛合金表面制备WSi_2/W5Si_3复合涂层。采用X射线衍射仪、扫描电镜、能谱仪对复合涂层的结构、组织形貌以及微区化学成分进行分析;对复合涂层显微硬度、附着力以及耐磨性进行测试。结果表明:WSi_2/W5Si_3复合涂层的WSi_2层和W_5Si_3层厚度分别为20、56μm,显微硬度平均值分别为10.70和8.32 GPa; WSi_2/W_5Si_3复合涂层与基体结合力为171.6 N; WSi_2/W5Si_3复合涂层表面摩擦因数为0.75,磨损率为1.184×10~(-6)mm~3·mm~(-1)。在TC4钛合金表面制备的WSi_2/W_5Si_3复合涂层结构均匀致密,与基体结合良好。
Abstract:The WSi_2/W_5Si_3 composite coating was prepared on the surface of the TC4 titanium alloy by magnetron sputtering( PVD),chemical vapor deposition( CVD) and thermal diffusion siliconizing method. The X-ray diffractometer,scanning electron microscope and energy spectrometer were used to analyze the structure,morphology and microdomain chemical composition of the composite coating. The microhardness,adhesion and wear resistance of the composite coating were tested. The results show that the thickness of the WSi_2 layer and W_5Si_3 layer of the WSi_2/W_5Si_3 composite coating is 20 μm and 56 μm,and the average microhardness is 10. 70 GPa and 8. 32 GPa respectively. The bonding force between WSi_2/W_5Si_3 composite coating in substrate is 171. 6 N. The surface friction factor of the WSi_2/W_5Si_3 composite coating is 0. 75,and the wear rate is 1. 184 × 10-6 mm3·mm-1. The WSi_2/W_5Si_3 composite coating prepared on the surface of TC4 titanium alloy has a uniform and dense structure,and it is well combined with the substrate.
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